JPS6321879Y2 - - Google Patents

Info

Publication number
JPS6321879Y2
JPS6321879Y2 JP1981116408U JP11640881U JPS6321879Y2 JP S6321879 Y2 JPS6321879 Y2 JP S6321879Y2 JP 1981116408 U JP1981116408 U JP 1981116408U JP 11640881 U JP11640881 U JP 11640881U JP S6321879 Y2 JPS6321879 Y2 JP S6321879Y2
Authority
JP
Japan
Prior art keywords
side wall
arc chamber
slits
slit
extraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981116408U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5821949U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11640881U priority Critical patent/JPS5821949U/ja
Publication of JPS5821949U publication Critical patent/JPS5821949U/ja
Application granted granted Critical
Publication of JPS6321879Y2 publication Critical patent/JPS6321879Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11640881U 1981-08-04 1981-08-04 イオン源装置 Granted JPS5821949U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11640881U JPS5821949U (ja) 1981-08-04 1981-08-04 イオン源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11640881U JPS5821949U (ja) 1981-08-04 1981-08-04 イオン源装置

Publications (2)

Publication Number Publication Date
JPS5821949U JPS5821949U (ja) 1983-02-10
JPS6321879Y2 true JPS6321879Y2 (en]) 1988-06-16

Family

ID=29910630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11640881U Granted JPS5821949U (ja) 1981-08-04 1981-08-04 イオン源装置

Country Status (1)

Country Link
JP (1) JPS5821949U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145120B1 (en) * 1983-08-15 1989-11-08 Applied Materials, Inc. Apparatus for ion implantation
JPS61151952A (ja) * 1984-12-26 1986-07-10 Ulvac Corp 集束ビ−ム発生用イオン源引出しスリツト装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555428Y2 (en]) * 1975-10-20 1980-02-07
JPS5820118B2 (ja) * 1975-10-29 1983-04-21 株式会社日立製作所 イオンカソクソウチ

Also Published As

Publication number Publication date
JPS5821949U (ja) 1983-02-10

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